Analytical expression for impact of linewidth roughness on critical dimension uniformity-Reference-Cited by-同舟云学术

Analytical expression for impact of linewidth roughness on critical dimension uniformity

Published:2014-06-27 Issue:2 Volume:13 Page:020501
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Mack Chris A.

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Line edge roughness impact on critical dimension variation

2. Local critical dimension variation from shot-noise related line edge roughness

3. Spectral analysis of line width roughness and its application to immersion lithography

4. Systematic errors in the measurement of power spectral density

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