Diffuse scattering due to stochastic disturbances of 1D-gratings on the example of line edge roughness-Reference-Cited by-同舟云学术

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Diffuse scattering due to stochastic disturbances of 1D-gratings on the example of line edge roughness

Published:2018-10-12 Issue:21 Volume:26 Page:28104
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Heusinger Martin,Michaelis Dirk,Flügel-Paul Thomas,Zeitner Uwe D.

Funder

Bundesministerium für Bildung und Forschung (BMBF)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference29 articles.

1. Overview on grating developments at ESA

2. On the influence of the e-beam writer address grid on the optical quality of high-frequency gratings

3. Large-scale segmentation errors in optical gratings and their unique effect onto optical scattering spectra

4. Rowland ghost suppression in high efficiency spectrometer gratings fabricated by e-beam lithography

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3. Developmental framework of line edge roughness reference standards for next-generation functional micro-/nanostructures;Precision Engineering;2023-09

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