Author:
Skidmore Jay A.,Spiers Guy D.,English John H.,Xu Zheng,Prater Craig B.,Coldren Larry A.,Hu Evelyn L.,Petroff Pierre M.
Cited by
3 articles.
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1. Surface topology of GaAs(100) after focused ion beam implantation of Si++;Applied Physics Letters;1997-03-10
2. Steady-state damage profiles due to reactive ion etching and ion-assisted etching;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1995-03
3. Contamination Control and Etch;Fundamentals of Semiconductor Processing Technology;1995