Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry-Reference-Cited by-同舟云学术

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Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry

Published:2014-03-07 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Janes Joachim,Hofmann Ulrich

Publisher

SPIE

Reference22 articles.

1. MEMS scanning laser projection based on high-Q vacuum packaged 2D resonators;Hofmann,2011

2. Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning;Hofmann,2014

3. Low cost compact MEMS scanning LADAR system for robotic applications;Moss,2012

4. A curved multimorph based electrothermal micromirror with large scan range and low drive voltage

5. Electromagnetic microactuators with multiple degrees of freedom;Wagner,1991

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices;Actuators;2020-03-31

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