Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Working equations for piezoelectric actuators and sensors;Weinberg;Journal of Microelectromechanical Systems,1999
2. MOEMS Micro-Opto-Electro-Mechanical Systems;Motamedi,2005
3. Analysis of bi-metal thermostats;Timoshenko;Journal of Optical Society of America,1925
4. Thermally excited silicon microactuators;Riethmüller;IEEE Transactions on Electron Devices,1988
5. Biaxial scanning mirror activated by bimorph structures for medical applications;Buser;Sensors and Actuators A: Physical,1992
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