Author:
Buser R.A.,de Rooij N.F.,Tischhauser H.,Dommann A.,Staufert G.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Silicon torsional scanning mirror;Petersen;IBM J. Res. Dev.,1980
2. Optical beam deflector using a piezoelectric bimorph actuator;Ono;Sensors and Actuators,1990
3. Applications of silicon-microactuators based on bimorph structures;Benecke;Proc. MEMS 89, Salt Lake City, UT, USA,1989
4. Thermally excited silicon microactuators;Riethmüller;IEEE Trans. Electron Devices,1988
5. J. H. Jerman, Electrically-activated, micromachined diaphragm, Microsystems Technologies 90, p. 806.
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