1. Plasma Etch Equipment;Handbook of Integrated Circuit Industry;2023-11-28
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3. Diffusion and Ion Implantation Equipment;Handbook of Integrated Circuit Industry;2023-11-28
4. Substrate Bias Effect of 28 nm-node HK/MG nMOSFETs with DPN Temperature Treatments;2023 IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia);2023-08-27
5. Direct electrification of silicon microfluidics for electric field applications;Microsystems & Nanoengineering;2023-06-19