Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives-Reference-Cited by-同舟云学术

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Development, characterization and application of compact spectrometers based on MEMS with in-plane capacitive drives

Published:2014-05-21 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Kenda A.,Kraft M.,Tortschanoff A.,Scherf W.,Sandner T.,Schenk H.,Lüttjohann S.,Simon A.

Publisher

SPIE

Reference20 articles.

1. Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors;Schenk,1999

2. apo-ident;Wolter,2014

3. Large deflection micromechanical scanning mirrors for linear scans and pattern generation

4. Development of high-efficient NIR-scanning gratings for spectroscopic applications;Zimmer,2006

5. Single-detector micro-electro-mechanical scanning grating spectrometer

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