All‐Silicon Double‐Cavity Fourier‐Transform Infrared Spectrometer On‐Chip
Author:
Affiliation:
1. Faculty of EngineeringAin‐Shams University Cairo 11517 Egypt
2. Optical MEMS Business Unit Si‐Ware Systems Cairo 11361 Egypt
Funder
European Commission
Publisher
Wiley
Subject
Industrial and Manufacturing Engineering,Mechanics of Materials,General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/admt.201900441
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1. Laser Spectroscopy for Atmospheric and Environmental Sensing
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