Processing grating structures on surfaces of wide-bandgap semiconductors using femtosecond laser and phase mask-Reference-Cited by-同舟云学术

Processing grating structures on surfaces of wide-bandgap semiconductors using femtosecond laser and phase mask

Published:2015-12-09 Issue:12 Volume:54 Page:126106
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Gao Bo¹,Chen Tao¹,Cui Wei¹,Li Cunxia²,Si Jinhai¹,Hou Xun¹

Affiliation:

1. Xi’an Jiaotong University, School of Electronics & Information Engineering, Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Lab of Information Photonic Technique, Xianning West Road, Xi’an 710049, China

2. Xi’an University of Technology, Department of Applied Physics, Yanxiang Road 58, Xi’an 710049, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference23 articles.

1. SiC MEMS: opportunities and challenges for applications in harsh environments

2. High-Brightness InGaN Blue, Green and Yellow Light-Emitting Diodes with Quantum Well Structures

3. InGaN-Based Multi-Quantum-Well-Structure Laser Diodes

4. Optical temperature sensor and thermal expansion measurement using a femtosecond micromachined grating in 6H-SiC

5. High-resolution patterning and characterization of optically pumped first-order GaN DFB lasers

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