Straightness measurement system based on phase sensitive detection technique
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SPIE
Reference8 articles.
1. Heterodyne interferometric system with subnanometer accuracy for measurement of straightness
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1. Beam drift reduction by straightness measurement based on a digital optical phase conjugation;Applied Optics;2019-09-19
2. An Online Simultaneous Measurement of the Dual-Axis Straightness Error for Machine Tools;Applied Sciences;2018-11-02
3. Two-dimensional straightness measurement based on optical knife-edge sensing;Review of Scientific Instruments;2017-09
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