Two-dimensional straightness measurement based on optical knife-edge sensing-Reference-Cited by-同舟云学术

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Two-dimensional straightness measurement based on optical knife-edge sensing

Published:2017-09 Issue:9 Volume:88 Page:095109
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Rev. Sci. Instrum.

Author:

Wang Chen¹^ORCID,Zhong Fenghe²^ORCID,Ellis Jonathan D.²³

Affiliation:

1. Department of Electrical and Computer Engineering, University of Rochester, Rochester, New York 14627, USA

2. The Institute of Optics, University of Rochester, Rochester, New York 14627, USA

3. Department of Mechanical Engineering, University of Rochester, Rochester, New York 14627, USA

Funder

National Science Foundation (NSF)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5002711

Reference22 articles.

1. Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage

2. An overview and a contribution to the optical measurement of linear displacement

3. R. Baldwin, “Interferometer system for measuring straightness and roll,” U.S patent 3,790,284 (5 February, 1974).

4. A laser interferometer for measuring straightness

5. Heterodyne interferometric system with subnanometer accuracy for measurement of straightness

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3. Geometry-based, Gaussian profile model for optical knife-edge displacement sensor;Precision Engineering;2022-01

4. Two-dimensional high-precision non-contact automatic measurement method based on image corner coordinates;Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science;2021-01-18

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