Heterodyne interferometric system with subnanometer accuracy for measurement of straightness
Author:
Publisher
The Optical Society
Reference8 articles.
1. Investigation and compensation of the nonlinearity of heterodyne interferometers
2. Nonlinearity in measurements of length by optical interferometry
3. Analytical modeling of the periodic nonlinearity in heterodyne interferometry
4. Periodic nonlinearity resulting from ghost reflections in heterodyne interferometry
5. Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement)
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