Investigation and compensation of the nonlinearity of heterodyne interferometers-Reference-Cited by-同舟云学术

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Investigation and compensation of the nonlinearity of heterodyne interferometers

Published:1992-04 Issue:2 Volume:14 Page:91-98
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Hou Wenmei,Wilkening Günter

Publisher

Elsevier BV

Subject

General Engineering

Reference8 articles.

1. A new measurement system for precision metrology;Sommargren;Prec Eng,1987

2. A new micrometer-controlled laser dimensional measurement and analysis system;Quenelle;Hewlett Packard Journal,1983

3. Hochauflösende Interferometrie mit Zweifrequenzlasern;Dorenwendt;PTB-Mitt,1980

4. Optische Phasenschieber für Zweifrequenz-Laser-Interferometrie;Reinboth;PTB-Mitt,1983

5. Residual errors in laser interferometry from air turbulence and nonlinearity;Bobroff;Appl Opt,1987

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