<title>Micro-optical and optomechanical systems fabricated by the LIGA technique

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Micro-optical and optomechanical systems fabricated by the LIGA technique

Published:1997-04-11 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Mohr Juergen,Goettert Jost,Mueller Andre,Ruther Patrick,Wengeling Klaus

Publisher

SPIE

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Polymer-based X-ray masks patterned by direct laser writing;Review of Scientific Instruments;2018-11

2. Optimization of laser writer-based UV lithography with high magnification optics to pattern X-ray lithography mask templates;Microsystem Technologies;2018-10-09

3. Characterization of the surface contamination of deep X-ray lithography mirrors exposed to synchrotron radiation;Journal of Synchrotron Radiation;2018-04-24

4. The LIGA Process;Bio-MEMS;2006-12-15

5. Microelectromechanical Systems for Spacecraft Communications;MEMS and Microstructures in Aerospace Applications;2005-10-06

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