Hotspot detection using squish-net

Author:

Yang Haoyu,Pathak Piyush,Gennari Frank E.,Lai Ya-Chieh,Yu Bei

Publisher

SPIE

Reference22 articles.

1. ICCAD-2012 CAD contest in fuzzy pattern matching for physical verification and benchmark suite;Torres,2012

2. “ITRS.” http://www.itrs.net.

3. Imbalance aware lithography hotspot detection: a deep learning approach;Yang;Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3),2017

4. Accurate lithography hotspot detection using deep convolutional neural networks

5. Optical proximity correction with hierarchical bayes model;Matsunawa,2015

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