Image quality enhancement of a CD-SEM image using conditional generative adversarial networks
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SPIE
Reference11 articles.
1. Need for LWR metrology standardization: the imec roughness protocol
2. Efficient processing of deep neural networks: A tutorial and survey;Sze,2017
3. Understanding the relationship between true and measured resist feature critical dimension and line edge roughness using a detailed scanning electron microscopy simulator
4. Learning a Deep Convolutional Network for image super-resolution;Dong,2014
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