1. All track directed self-assembly of block copolymers: process flow and origin of defects;Rincon Degadillo,2012
2. Defect source analysis of directed self-assembly process (DSA of DSA);Rincon Degadillo,2013
3. Gronheid, R., Rincon Degadillo, P. A., Pathangi, H., Van den Heuvel, D., Parnell, D., Chan, B. T., Lee, Y. T., Van Look, L., Cao, Y., Her, Y., Lin, G., Harukawa, R., Nagaswami, V., D'Urzo, L., Somervell, M., Nealey, P., “Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy flow,” Proc. SPIE 9049, 904905 (2014)
4. Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow;Pathangi,2015
5. Pattern scaling with directed self assembly through lithography and etch process integration;Rathsack,2012