Block copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study-Reference-Cited by-同舟云学术

Block copolymer directed self-assembly defect modes induced by localized errors in chemoepitaxial guiding underlayers: A molecular simulation study

Published:2020-05 Issue:3 Volume:38 Page:032604
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Delony Jakin B.¹^ORCID,Ludovice Peter J.²^ORCID,Henderson Clifford L.¹

Affiliation:

1. Department of Chemical and Biomedical Engineering, University of South Florida, 4202 E. Fowler Avenue, ENG 030, Tampa, Florida 33620

2. School of Chemical and Biomolecular Engineering, Georgia Institute of Technology, 311 Ferst Drive NW, Ford Environmental Science & Technology Building, Atlanta, Georgia 30332

Funder

National Science Foundation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.5131639

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