Experimental evaluation of the impact of EUV pellicles on reticle imaging-Reference-Cited by-同舟云学术

Experimental evaluation of the impact of EUV pellicles on reticle imaging

Published:2018-10-03 Issue: Volume: Page:
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Container-title:Photomask Technology 2018
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Author:

Mochi Iacopo,Rajeev Rajendran,Helfenstein Patrick,Fernandez Sara,Kazazis Dimitrios,Ekinci Yasin,Gallagher Emily,Timmermans Marina,Mariano Juste Marina,Pollentier Ivan

Publisher

SPIE

Reference9 articles.

1. Actinic inspection of EUV reticles with arbitrary pattern design;Mochi,2017

2. RESCAN: an actinic lensless microscope for defect inspection of EUV reticles

3. Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging

4. Ptychographic characterization of the wavefield in the focus of reflective hard X-ray optics

5. CNT EUV pellicle: moving towards a full-size solution;Timmermans;Photomask Technology,2017

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1. Quantitative characterization of absorber and phase defects on EUV reticles using coherent diffraction imaging;Journal of Micro/Nanolithography, MEMS, and MOEMS;2020-01-30

2. Through-pellicle imaging of extreme ultraviolet mask with extreme ultraviolet ptychography microscope;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-09-28

3. Amplitude and phase defect inspection on EUV reticles using RESCAN;Extreme Ultraviolet (EUV) Lithography X;2019-03-26

4. Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-03-13

5. Free-standing carbon nanotube films for extreme ultraviolet pellicle application;Journal of Micro/Nanolithography, MEMS, and MOEMS;2018-11-27