Auto-score system to optimize OPC recipe parameters using genetic algorithm-Reference-Cited by-同舟云学术

Auto-score system to optimize OPC recipe parameters using genetic algorithm

Author:

Cao Liang¹,Asthana Abhishek¹,Ning Guoxiang¹,Feng Jui-Hsuan¹,Zhang Jie¹,Wilkinson William¹

Affiliation:

1. GLOBALFOUNDRIES (United States)

Publisher

SPIE

Reference6 articles.

1. Optimize the OPC control recipe with cost function;Liu,2010

2. OPC recipe optimization using genetic algorithm;Asthana,2016

3. OPC recipe optimization using simulated annealing;Desouky,2010

4. Optimizing model based OPC fragmentation using genetic algorithms;Dipaola,2008

5. A novel method for utilizing AIMS to evaluate mask repair and quantify over-repair or under-repair condition;Uzzel,2013

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Kissing corner handling in advanced nodes;Design-Process-Technology Co-optimization for Manufacturability XIV;2020-03-23

2. Tip-to-tip variation mitigation in extreme ultraviolet lithography for 7 nm and beyond metallization layers and design rule analysis;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-11