1. http://www.itrs.net/Links/2013ITRS/Summary2013.htm.
2. Scatterfield microscopy of 22-nm node patterned defects using visible and DUV light,;Barnes,2012
3. Enhancing 9 nm node dense patterned defect optical inspection using polarization, angle, and focus,;Barnes,2013
4. Semiconductor wafer defect detection using digital holography,;Schulze,2003
5. Diffraction phase microscopy for quantifying cell structure and dynamics