Affiliation:
1. Intel Corporation, Components Research, Hillsboro, Oregon, United States
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Complementary lithography–broad brush approach;Borodovsky,2002
2. Lithography tool requirements;Phillips,2013
3. Introduction to statistics;Lane,2013
4. Simulation study of the influence of PEB reaction rates on resist LER
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