1. Impact of local variability on defect-aware process windows;Maslow,2019
2. EUVL Workshop;Hansen,2018
3. Lithographic stochastics: beyond 3σ
4. Theofanis, P. L., Tazetdinov, O., Optical and EUV Nanolithography XXXV, PC120510I
5. Hansen, Steve, private communication.