A study of lateral roughness evaluation through critical-dimension small angle x-ray scattering (CD-SAXS)
Author:
Affiliation:
1. Univ. Grenoble Alpes (France)
2. SIMAP (France)
Publisher
SPIE
Reference18 articles.
1. ITRS (2013). International Technology Roadmap for Semiconductors, http://www.itrs.net/.
2. Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings
3. On the intersection of grating truncation rods with the Ewald sphere studied by grazing-incidence small-angle X-ray scattering
4. Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings
5. Direct structural characterisation of line gratings with grazing incidence small-angle x-ray scattering
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