Research on coherent light measurement based on white light interferometry for semiconductor industry
Author:
Publisher
SPIE
Reference11 articles.
1. Quantitative phase imaging in biomedicine
2. Fast and robust two-frame random phase-shifting interferometry without pre-filtering
3. Phase recovery technology of a dual-frame phase-shifting interferogram based on first-order norm vector normalization
4. Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement
5. A Novel Surface Recovery Algorithm for Dual Wavelength White LED in Vertical Scanning Interferometry (VSI)
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