Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement
Author:
Funder
National Natural Science Foundation of China
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference13 articles.
1. Improved vertical-scanning interferometry
2. Single-shot low coherence pointwise measuring interferometer with potential for in-line inspection
3. Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
4. Long-working-distance incoherent-light interference microscope
5. Determination of fringe order in white-light interference microscopy
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