Author:
Trujillo-Sevilla Juan Manuel,Casanova-Gonzáleza Oscar,Velasco-Ocaña Miriam,Ceruso Sabato,Oliva-García Ricardo,Gómez-Cárdenes Óscar,Martín-Hernández Javier,Roqué-Velasco Alex,Perez Alvaro,Rodríguez-Ramos José Manuel,Gaudestad Jan O.
Cited by
2 articles.
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1. New wavefront phase sensor used for 3D shape measurements of silicon wafers;Emerging Imaging and Sensing Technologies for Security and Defence VII;2022-12-07
2. Wave front phase imaging for silicon wafer metrology;Novel Optical Systems, Methods, and Applications XXV;2022-10-03