Study of Sn removal processes for in-situ collector cleaning
Author:
Affiliation:
1. Univ. of Illinois at Urbana-Champaign (United States)
Publisher
SPIE
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1. Low‐temperature reduction of SnO 2 by floating wire‐assisted medium‐pressure H 2 /Ar plasma;Plasma Processes and Polymers;2022-02-21
2. Tin deposition on ruthenium and its influence on blistering in multi-layer mirrors;Physical Chemistry Chemical Physics;2021
3. Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H2/Ar plasma at atmospheric pressure;Scientific Reports;2020-10-20
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