Tin deposition on ruthenium and its influence on blistering in multi-layer mirrors
Author:
Affiliation:
1. DIFFER–Dutch Institute for Fundamental Energy Research
2. Eindhoven
3. The Netherlands
4. Center for Computational Energy Research
5. Department of Applied Physics
6. Eindhoven University of Technology
Abstract
A monolayer of Sn makes the Ru surface more permeable to H, but more layers inhibit H penetration.
Funder
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2021/CP/D1CP01082D
Reference25 articles.
1. Oxidation and Reduction of Ultrathin Nanocrystalline Ru Films on Silicon: Model System for Ru-Capped Extreme Ultraviolet Lithography Optics
2. Design and performance of capping layers for EUV multilayer mirrors
3. Sn etching with hydrogen radicals to clean EUV optics
4. Collector optic cleaning by in-situ hydrogen plasma
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