Implementation and performance of a femtosecond laser mask repair system in manufacturing

Author:

Haight Richard A.,Hayden Dennis,Longo Peter,Neary Timothy E.,Wagner Alfred

Publisher

SPIE

Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Structuring of thin films by ultrashort laser pulses;Applied Physics A;2022-12-08

2. Femtosecond laser microfabrication of micro-channels on (1 0 0) silicon surfaces;Materials Today: Proceedings;2020

3. Ultrashort pulse laser repair of photomasks for advanced lithography technologies;Photomask Technology 2018;2018-10-03

4. Update on the performance of photomask repair and clean with DUV femtosecond laser processes;Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology;2018-06-12

5. Femtosecond laser-induced damage of gold films;Applied Surface Science;2007-07

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