Femtosecond laser microfabrication of micro-channels on (1 0 0) silicon surfaces
Author:
Funder
Deanship of Scientific Research, King Saud University
Publisher
Elsevier BV
Subject
General Medicine
Reference8 articles.
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3. Micro-milling tool mark removal mechanism by fluid jet polishing and its application for the precision manufacturing of micro-fluidic chip molds;Tribology International;2023-11
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