Experimental study on template-based electrophoretically assisted microultrasonic machining of micro-channel

Abstract

Abstract Such as silicon and glass and other hard brittle materials have strong inertness and chemical stability, are the ideal substrate for the preparation of micro-channel. In order to realize high precision and high-efficiency machining of hard and brittle materials micro-channel, the author innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). The micro-channel shape punch-pin was transferred to the workpiece by micro-ultrasonic machining (MUSM). Due to the electrophoretic characteristics of ultrafine abrasive particles, applying DC field can guarantee the existence of the ultrafine abrasive in machining area. Four process parameters (Average particle size, Particle concentration, Ultrasonic power and Electrophoretic DC voltage) single - factor experiment and orthogonal experiment were carried out for TBEPAMUSM. The single - factor experimental study found that: 1) The increase of average particle size and ultrasonic power can effectively improve the material removal rate (MRR), but the surface roughness (SR) also decreases. 2)The increase of abrasive concentration will reduce the SR, but suitable concentration can maximize the MRR. 3) When suitable DC voltage were introduced, the MRR and SR can be effectively improved. The orthogonal experiment results show that average particle size has the greatest effect on both SR and MRR. Considering the balance between machining quality and machining efficiency, the optimal parameters were as follows: ultrasonic power 70%, average abrasive particle size 18 µm, abrasive concentration 18%, DC voltage 40 V.