Efficient global sensitivity analysis for silicon line gratings using polynomial chaos-Reference-Cited by-同舟云学术

Efficient global sensitivity analysis for silicon line gratings using polynomial chaos

Published:2019-06-21 Issue: Volume: Page:
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Container-title:Modeling Aspects in Optical Metrology VII
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Author:

Farchmin Nando,Hammerschmidt Martin,Schneider Philipp-Immanuel,Wurm Matthias,Bär Markus,Heidenreich Sebastian

Publisher

SPIE

Reference18 articles.

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2. Importance measures in global sensitivity analysis of nonlinear models

3. Variance based sensitivity analysis of model output. Design and estimator for the total sensitivity index

4. Global sensitivity analysis using polynomial chaos expansions

5. Quantifying parameter uncertainties in optical scatterometry using bayesian inversion;Hammerschmidt,2017

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