Self-assembling materials for lithographic patterning: overview, status, and moving forward
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Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Application and Perspectives of Simulation Methods Based on Field Theory in Soft Matter;ACTA POLYM SIN;2024
2. Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices;Polymers;2020-10-21
3. DSA materials contributions to the defectivity performance of 14nm half-pitch LiNe flow at IMEC;SPIE Proceedings;2016-03-22
4. Order–disorder transition in thin films of horizontally-oriented cylinder-forming block copolymers: thermal fluctuations vs. preferential wetting;Soft Matter;2016
5. Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure;Journal of Micro/Nanolithography, MEMS, and MOEMS;2015-09-21
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