Surface affinity role in graphoepitaxy of lamellar block copolymers-Reference-Cited by-同舟云学术

Surface affinity role in graphoepitaxy of lamellar block copolymers

Published:2016-08-25 Issue:3 Volume:15 Page:031604
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Claveau Guillaume¹,Quemere Patrick¹,Argoud Maxime¹,Hazart Jerome¹,Barros Patricia Pimenta¹,Sarrazin Aurelien¹,Posseme Nicolas¹,Tiron Raluca¹,Chevalier Xavier²,Nicolet Celia²,Navarro Christophe²

Affiliation:

1. CEA-LETI, MINATEC Campus, 17 Rue des Martyrs, 38054 Grenoble, France

2. ARKEMA FRANCE, Groupement de Recherches de Lacq, R.N. 117, BP34-64170 Lacq, France

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Template affinity role in CH shrink by DSA planarization

2. DSA planarization approach to solve pattern density issue

3. Block Copolymer Lithography

4. All track directed self-assembly of block copolymers: process flow and origin of defects

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