1. Image placement error: closing the gap between overlay and imaging;Hendrickx,2005
2. B. W. Smith, Microlithography, Science and Technology, J. R. Sheats and B. W. Smith, Eds., Chap. 3, p. 221, Marcel Dekker, New York
3. Light-diffraction-based overlay measurement
4. Achieving Optimum Diffraction Based Overlay Performance;Leray,2010
5. On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections;Bhattacharyya,2013