1. 创新链赶超: 中国集成电路产业的创新与发展;曲永义;经济管理,2022
2. Innovation chain catches up: innovation and development of Chinas IC industry;X J Li;Business Management Journal,2022
3. International Roadmap for Devices and Systems (IRDSTM),0
4. Spectral purity systems applied for laser-produced plasma extreme ultraviolet lithography sources: a review;Y Y Chen;High Power Laser Science and Engineering,2023
5. Optical wafer metrology sensors for process-robust CD and overlay control in semiconductor device manufacturing;A J den Boef;Surface Topography: Metrology and Properties,2016