Investigation of model-based physical design restrictions (Invited Paper)-Reference-Cited by-同舟云学术

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Investigation of model-based physical design restrictions (Invited Paper)

Published:2005-05-05 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Design and Process Integration for Microelectronic Manufacturing III
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Author:

Lucas Kevin,Baron Stanislas,Belledent Jerome,Boone Robert,Borjon Amandine,Couderc Christophe,Patterson Kyle,Riviere-Cazaux Lionel,Rody Yves,Sundermann Frank,Toublan Olivier,Trouiller Yorick,Urbani Jean-Christophe,Wimmer Karl

Publisher

SPIE

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Leakage reduction through optimization of regular layout parameters;Microelectronics Journal;2012-01

2. Stat-LRC: statistical rules check for variational lithography;SPIE Proceedings;2010-03-11

3. Accurate Systematic Hot-Spot Scoring Method and Score-Based Fixing Guidance Generation;IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences;2009

4. Lithography-simulation-based design for manufacturability rule development: an integrated circuit design house’s approach;Journal of Micro/Nanolithography, MEMS, and MOEMS;2007-07-01

5. Beyond rule-based physical verification;SPIE Proceedings;2006-10-06

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