Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method-Reference-Cited by-同舟云学术

Off-axis sputter deposition of ZnO films on c-sapphire substrates by utilizing nitrogen-mediated crystallization method

Published:2014-08-27 Issue:8 Volume:53 Page:087109
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Itagaki Naho¹,Kuwahara Kazunari²,Matsushima Koichi²,Yamashita Daisuke²,Seo Hyunwoong²,Koga Kazunori²,Shiratani Masaharu²

Affiliation:

1. Kyushu University, Graduate School of Information Science and Electrical Engineering, 744 Motooka, Nishi-ku, Fukuoka, 819-0395 JapanbJapan Science and Technology Agency, PRESTO, 3-5 Sanbancho, Chiyoda-ku, Tokyo, 102-0075 Japan

2. Kyushu University, Graduate School of Information Science and Electrical Engineering, 744 Motooka, Nishi-ku, Fukuoka, 819-0395 Japan

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference49 articles.

1. Present status and future prospects for development of non- or reduced-indium transparent conducting oxide thin films

2. Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering

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4. ZnO transparent thin films for gas sensor applications

5. A comprehensive review of ZnO materials and devices

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