Measuring the polarization aberration of hyper-NA lens from the vector aerial image-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Measuring the polarization aberration of hyper-NA lens from the vector aerial image

Published:2014-08-21 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Dong Lisong,Li Yanqiu,Dai Xuebing,Liu Hao,Liu Ke

Publisher

SPIE

Reference18 articles.

1. How to describe polarization influence on imaging;Totzeck,2005

2. Polarization Aberration Analysis Using Pauli-Zernike Representation;Yamamoto,2007

3. A technique for extracting and analyzing the polarization aberration of hyper-numerical aperture image optics;Li,2013

4. In-situ polarimetry of illumination for 193-nm lithography;Nomura,2008

5. Mueller matrix polarimetry for immersion lithography tools with a polarization monitoring system at the wafer plane;Nomura,2009

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 大数值孔径（NA=0.55）变倍率极紫外光刻投影物镜偏振像差高精度检测方法;Acta Optica Sinica;2022

2. Rigorous imaging-based measurement method of polarization aberration in hyper-numerical aperture projection optics;Optics Express;2021-06-17

3. Hybrid calibration method of a wide-view-angle Mueller polarimeter for hyper-numerical-aperture imaging systems;Chinese Optics Letters;2020

4. Characteristic and compensation research on polarization effect from the front optical system of imaging polarimeters;Optik;2019-09

5. A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image;Optics Express;2018-11-28

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3