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A nonlinear measurement method of polarization aberration in immersion projection optics by spectrum analysis of aerial image

  • Published:2018-11-28 Issue:25 Volume:26 Page:32743
  • ISSN:1094-4087
  • Container-title:Optics Express
  • language:en
  • Short-container-title:Opt. Express

Author:

Li Enze,Li Yanqiu,Sheng Naiyuan,Li Tie,Sun Yiyu,Wei Pengzhi

Funder

National Natural Science Foundation of China (NSFC)

National Science and Technology Major Project

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 大数值孔径（NA=0.55）变倍率极紫外光刻投影物镜偏振像差高精度检测方法;Acta Optica Sinica;2022

2. Polarization aberration in-situ measurement in lithography tools;10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies;2021-12-13

3. Comprehensive and quantitative characterization and analysis method of 3D mask effect for lithography simulation;10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies;2021-12-13

4. Rigorous imaging-based measurement method of polarization aberration in hyper-numerical aperture projection optics;Optics Express;2021-06-17

5. Hybrid calibration method of a wide-view-angle Mueller polarimeter for hyper-numerical-aperture imaging systems;Chinese Optics Letters;2020
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