Orthonormal polynomials describing polarization aberration for M-fold optical systems
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference6 articles.
1. Orthogonal polynomials describing polarization aberration for rotationally symmetric optical systems
2. Symmetry of spatial-dispersion-induced birefringence and its implications for CaF2 ultraviolet optics
3. Using orientation Zernike polynomials to predict the imaging performance of optical systems with birefringent and partly polarizing components
4. Automatic clocking optimization for compensating two-dimensional tolerances
5. Reducing symmetric polarization aberrations in a lens by annealing
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2. Vectorial pupil optimization to compensate polarization distortion in immersion lithography system;Optics Express;2020-02-03
3. Multi-objective lithographic source mask optimization to reduce the uneven impact of polarization aberration at full exposure field;Optics Express;2019-05-17
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