Automatic clocking optimization for compensating two-dimensional tolerances
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference6 articles.
1. Present and future industrial metrology needs for qualification of high-quality optical microlithography materials
2. Overview of CODE V development
3. Compensator Selection In The Tolerancing Of A Microlithographic Lens
4. Improving lens performance through the most recent lens manufacturing process
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1. Method for compensation selection of a microlithographic optical system;Applied Optics;2020-05-14
2. Optimization based on sensitivity for material birefringence in projection lens;Chinese Optics Letters;2020
3. Self-compensation for trefoil aberration of symmetric dioptric microlithographic lens;Optical System Alignment, Tolerancing, and Verification XI;2017-08-22
4. A new method to optimize the azimuth angle of elements in a projection lens;Optics Communications;2016-12
5. Orthonormal polynomials describing polarization aberration for M-fold optical systems;Optics Express;2016-02-26
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