大数值孔径(NA=0.55)变倍率极紫外光刻投影物镜偏振像差高精度检测方法
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Published:2022
Issue:23
Volume:42
Page:2312001
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Li Ang 李昂,Li Yanqiu 李艳秋,Wei Pengzhi 韦鹏志,Yuan Miao 袁淼,Wang Chengcheng 王成成
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials