Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. C. H. Chien and Z. P. Chen , “Fabrication of a novel integrated backlight plate for backlight system by MEMS and hot embossing technology,” inTech. Digest APCOT 2006: Asia-Pacific Conf. of Transducers and Micro-Nano Technology, Singapore, June 25–28, 2006, p. B-16 (2006).
2. Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique
3. Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators for Micro Conveyer Systems
4. Multiple-height Microstructures Fabricated by ICP-RIE and Embedded Masking Layers
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