Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique-Reference-Cited by-同舟云学术

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Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique

Published:2003-03-17 Issue:3 Volume:13 Page:430-435
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zhao Yongjun,Cui Tianhong

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Electrophysics of micromechanical comb actuators

2. Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives

3. Optimal shape design of an electrostatic comb drive in microelectromechanical systems

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