Author:
Fang Dongming,Zheng Fengjie,Chen Bo,Wang Yu,Fang Yigeng,Yang Pengfei,Wen Xiaolong,Peng Chunrong,Xia Shanhong
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
6 articles.
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1. Novel fringing field model for MEMS resonators;International Journal of Advances in Engineering Sciences and Applied Mathematics;2023-10-17
2. Ultra-Low-Power Logic with Contactless Capacitive MEMS;2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2022-12-12
3. Characterization of Accelerated Fatigue in Thick Epi-Polysilicon Vacuum Encapsulated MEMS Resonators;Journal of Microelectromechanical Systems;2020-12
4. A flexible model for studying fringe field effect on parallel plate actuators;Journal of Electrical Systems and Information Technology;2020-09-10
5. Analysis on edge effect of MEMS capacitance diaphragm gauge with square pressure-sensing diaphragm;Microsystem Technologies;2018-11-29