First results from the Large Dynamic Range Atomic Force Microscope for overlay metrology-Reference-Cited by-同舟云学术

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First results from the Large Dynamic Range Atomic Force Microscope for overlay metrology

Published:2019-03-26 Issue: Volume: Page:
ISSN:
Container-title:Metrology, Inspection, and Process Control for Microlithography XXXIII
language:
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Author:

Witvoet Gert,Peters Joost,Kuiper Stefan,Keyvani Sasan,Willekers Rob

Publisher

SPIE

Reference14 articles.

1. Atomic Force Microscope

2. Atomic Force Microscopy

3. Design of a long stroke translation stage for AFM

4. Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

5. Development of a metrological atomic force microscope with minimized Abbe error and differential interferometer-based real-time position control

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Metrology;2021 IEEE International Roadmap for Devices and Systems Outbriefs;2021-11

2. Atomic Force Microscopy Breaking Through the Vertical Range-Bandwidth Tradeoff;IEEE Transactions on Industrial Electronics;2021-01

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