Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=4/a=044006/pdf
Reference20 articles.
1. Recent developments in dimensional nanometrology using AFMs
2. Accurate and traceable calibration of one-dimensional gratings
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4. Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements
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